Adams, C. M. & Hardway, G. A. Fundamentals of laser beam machining and drilling. IEEE Trans. Ind. Gen. Appl. 2, 90–96 (1965).
Kerse, C. et al. Ablation-cooled material removal with ultrafast bursts of pulses. Nature 537, 84–88 (2016).
Park, M., Gu, Y., Mao, X., Grigoropoulos, C. P. & Zorba, V. Mechanisms of ultrafast GHz burst fs laser ablation. Sci. Adv. 9, eadf6397 (2023).
Öktem, B. et al. Nonlinear laser lithography for indefinitely large-area nanostructuring with femtosecond pulses. Nat. Photonics 7, 897–901 (2013).
Tokel, O. et al. In-chip microstructures and photonic devices fabricated by nonlinear laser lithography deep inside silicon. Nat. Photonics 11, 639–645 (2017).
Kumagai, M. et al. Advanced dicing technology for semiconductor wafer—stealth dicing. IEEE Trans. Semicond. Manuf. 20, 259–265 (2007).
Malinauskas, M. et al. Ultrafast laser processing of materials: from science to industry. Light Sci. Appl. 5, e16133 (2016).
Novotny, L. & Hecht, B. Principles of Nano-Optics (Cambridge Univ. Press, 2012).
Indebetouw, G. Nondiffracting optical fields: some remarks on their analysis and synthesis. J. Opt. Soc. Am. A 6, 150–152 (1989).
Durnin, J., Miceli, J. J. & Eberly, J. H. Diffraction-free beams. Phys. Rev. Lett. 58, 1499–1501 (1987).
Bialynicki-Birula, I. & Bialynicka-Birula, Z. Heisenberg uncertainty relations for photons. Phys. Rev. A 86, 022118 (2012).
McCutchen, C. W. Generalized aperture and the three-dimensional diffraction image. J. Opt. Soc. Am. 54, 240–244 (1964).
Betzig, E. & Trautman, J. K. Near-field optics: microscopy, spectroscopy, and surface modification beyond the diffraction limit. Science 257, 189–195 (1992).
Li, Z.-Z. et al. O-FIB: far-field-induced near-field breakdown for direct nanowriting in an atmospheric environment. Light Sci. Appl. 9, 41 (2020).
Yan, Z., Gao, J., Beresna, M. & Zhang, J. Near-field mediated 40 nm in-volume glass fabrication by femtosecond laser. Adv. Opt. Mater. 10, 2101676 (2022).
Lei, Y. et al. High speed ultrafast laser anisotropic nanostructuring by energy deposition control via near-field enhancement. Optica 8, 1365–1371 (2021).
Plech, A., Leiderer, P. & Boneberg, J. Femtosecond laser near field ablation. Laser Photonics Rev. 3, 435–451 (2009).
Wu, H. et al. Photonic nanolaser with extreme optical field confinement. Phys. Rev. Lett. 129, 013902 (2022).
Liu, H., Lin, W. & Hong, M. Hybrid laser precision engineering of transparent hard materials: challenges, solutions and applications. Light Sci. Appl. 10, 162 (2021).
Bhuyan, M. K. et al. Ultrafast laser nanostructuring in bulk silica, a ‘slow’ microexplosion. Optica 4, 951–958 (2017).
Jiang, L., Wang, A.-D., Li, B., Cui, T.-H. & Lu, Y.-F. Electrons dynamics control by shaping femtosecond laser pulses in micro/nanofabrication: modeling, method, measurement and application. Light Sci. Appl. 7, 17134 (2018).
Chanal, M. et al. Crossing the threshold of ultrafast laser writing in bulk silicon. Nat. Commun. 8, 773 (2017).
Wang, A. et al. Burst mode enabled ultrafast laser inscription inside gallium arsenide. Int. J. Extrem. Manuf. 4, 045001 (2022).
Götte, N. et al. Temporal Airy pulses for controlled high aspect ratio nanomachining of dielectrics. Optica 3, 389–395 (2016).
Liu, X., Clady, R., Grojo, R., Utéza, O. & Sanner, N. Engraving depth-controlled nanohole arrays on fused silica by direct short-pulse laser ablation. Adv. Mater. Interfaces 10, 2202189 (2023).
Juodkazis, S. et al. Laser-induced microexplosion confined in the bulk of a sapphire crystal: evidence of multimegabar pressures. Phys. Rev. Lett. 96, 166101 (2006).
Bellouard, Y. et al. Stress-state manipulation in fused silica via femtosecond laser irradiation. Optica 3, 1285–1293 (2016).
Tan, D., Zhang, B. & Qiu, J. Ultrafast laser direct writing in glass: thermal accumulation engineering and applications. Laser Photonics Rev. 15, 2000455 (2021).
Flamm, D. et al. Structured light for ultrafast laser micro- and nanoprocessing. Opt. Eng. 60, 025105 (2021).
Salter, P. S. & Booth, M. J. Adaptive optics in laser processing. Light Sci. Appl. 8, 110 (2019).
Meyer, R. et al. Single-shot ultrafast laser processing of high-aspect-ratio nanochannels using elliptical Bessel beams. Opt. Lett. 42, 4307–4310 (2017).
Velpula, P. K. et al. Spatio-temporal dynamics in nondiffractive Bessel ultrafast laser nanoscale volume structuring. Laser Photonics Rev. 10, 230–244 (2016).
Mahmoud Aghdami, K., Rahnama, A., Ertorer, E. & Herman, P. R. Laser nano-filament explosion for enabling open-grating sensing in optical fibre. Nat. Commun. 12, 6344 (2021).
Couairon, A. & Mysyrowicz, A. Femtosecond filamentation in transparent media. Phys. Rep. 441, 47–189 (2007).
Motoyoshi, M. Through-silicon via (TSV). Proc. IEEE 97, 43–48 (2009).
Sugioka, K. & Cheng, Y. Ultrafast lasers—reliable tools for advanced materials processing. Light Sci. Appl. 3, e149 (2014).
Kawata, S., Sun, H.-B., Tanaka, T. & Takada, K. Finer features for functional microdevices. Nature 412, 697–698 (2001).
Lin, Z., Liu, H., Ji, L., Lin, W. & Hong, M. Realization of ~10 nm features on semiconductor surfaces via femtosecond laser direct patterning in far field and in ambient air. Nano Lett. 20, 4947–4952 (2020).
Rapp, L. et al. High aspect ratio micro-explosions in the bulk of sapphire generated by femtosecond Bessel beams. Sci. Rep. 6, 34286 (2016).
Li, Z., Allegre, O. & Li, L. Realising high aspect ratio 10 nm feature size in laser materials processing in air at 800 nm wavelength in the far-field by creating a high purity longitudinal light field at focus. Light Sci. Appl. 11, 339 (2022).
Meyer, R. et al. Extremely high-aspect-ratio ultrafast Bessel beam generation and stealth dicing of multi-millimeter thick glass. Appl. Phys. Lett. 114, 201105 (2019).
Bellouard, Y., Said, A., Dugan, M. & Bado, P. Fabrication of high-aspect ratio, micro-fluidic channels and tunnels using femtosecond laser pulses and chemical etching. Opt. Express 12, 2120–2129 (2004).
Ródenas, A. et al. Three-dimensional femtosecond laser nanolithography of crystals. Nat. Photonics 13, 105–109 (2019).
Meyer, R., Giust, R., Jacquot, M., Dudley, J. M. & Courvoisier, F. Submicron-quality cleaving of glass with elliptical ultrafast Bessel beams. Appl. Phys. Lett. 111, 231108 (2017).
Stoian, R. Volume photoinscription of glasses: three-dimensional micro- and nanostructuring with ultrashort laser pulses. Appl. Phys. A 126, 438 (2020).
Lancry, M. et al. Ultrafast nanoporous silica formation driven by femtosecond laser irradiation. Laser Photonics Rev. 7, 953–962 (2013).
Xu, Q., Almeida, V. R., Panepucci, R. R. & Lipson, M. Experimental demonstration of guiding and confining light in nanometer-size low-refractive-index material. Opt. Lett. 29, 1626–1628 (2004).
Hentschel, M. et al. Dielectric Mie voids: confining light in air. Light Sci. Appl. 12, 3 (2023).
Zhang, J. et al. Ultra-wide bandgap semiconductor Ga2O3 power diodes. Nat. Commun. 13, 3900 (2022).
Liang, Z., Wu, J., Cui, Y., Sun, H. & Ning, C.-Z. Self-optimized single-nanowire photoluminescence thermometry. Light Sci. Appl. 12, 36 (2023).
Sander, T. H. et al. Magnetoencephalography with a chip-scale atomic magnetometer. Biomed. Opt. Express 3, 981–990 (2012).
Delgoffe, A., Nazir, S., Hakobyan, S., Hönninger, C. & Bellouard, Y. All-glass miniature GHz repetition rate femtosecond laser cavity. Optica 10, 1269–1279 (2023).
Rahim, K. & Mian, A. A review on laser processing in electronic and MEMS packaging. J. Electron. Packag. 139, 030801 (2017).
Sugioka, K. et al. Femtosecond laser 3D micromachining: a powerful tool for the fabrication of microfluidic, optofluidic, and electrofluidic devices based on glass. Lab Chip 14, 3447–3458 (2014).
Chambonneau, M. et al. In-volume laser direct writing of silicon—challenges and opportunities. Laser Photonics Rev. 15, 2100140 (2021).
Li, L., Kong, W. & Chen, F. Femtosecond laser-inscribed optical waveguides in dielectric crystals: a concise review and recent advances. Adv. Photonics 4, 024002 (2022).
Buschlinger, R., Nolte, S. & Peschel, U. Self-organized pattern formation in laser-induced multiphoton ionization. Phys. Rev. B 89, 184306 (2014).
Déziel, J.-L., Dubé, L. J. & Varin, C. Dynamical rate equation model for femtosecond laser-induced breakdown in dielectrics. Phys. Rev. B 104, 045201 (2021).
Garcia-Lechuga, M. et al. Simultaneous time–space resolved reflectivity and interferometric measurements of dielectrics excited with femtosecond laser pulses. Phys. Rev. B 95, 214114 (2017).